Special vacuum mounting technology without roller (Roller mounting Optional) |
Configure with multi link wafer transfer robot |
Bernoulli arm for thinner wafer handling |
Wafer position & warpage intelligent mapping |
Fiber sensor for wafer alignment |
Contact chuck to handle various wafer |
Wafer cassette loading (Wafer Box Optional) |
Industrial PC control with 17’touch panel LCD |
Built-in Ionizers for ESD protection |