Efficient Wafer Handling system streamlines wafers for greater productivity. |
Continuous Digital Magnification Vision system provides fast and accurate alignment for maximum throughput |
Blade Wear Prediction algorithm reduces height measurement time and increases UPH |
Touch Panel Display supports a user-friendly graphical interface (GUI) |
Atomized Wafer Cleaning technology for superior process results |
Dedicated Dressing Cassette to enable automatic blade dressing |
Built-in Inspection Tray for in-process quality assessment |
Small footprint |