MITO DENKO PLD-MComposite PLD Equipment
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    Composite PLD Equipment PLD-M Feature:


    The design based on abundant sales performance can realize stable operation

    It is possible to combine other sputtering sources and deposition sources

    Up to φ2inch large diameter substrate, and it is possible to experiment in 

    a wide range of pressure by adopting a φ2inch dedicated lamp

    A wide variety of options can be selected, including an option that provides 

    a uniform distribution for a board size of up to φ2 inches by a sequence mounted on a large area PLD









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