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    RHEED Unit——RHEED-1000 Feature:

    Can be easily changed to the differential pumping type to support ultra-high vacuum

    Compact body is adopted for the maximum of 30KV,ideal for mounting in a small chamber 

    Φ34 ICF is used for the mounting flange

    Control from PC without using remote control box

    up to 30 kV compact HV power supply

    up to 1Pa by Single differential pumping

    High-pressure up to 100Pa workable * by double-stage differential pumping (option)

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