TDM-TABLE TOP加热翘曲测试仪/warpage analysis: |
The TDM–TABLE TOP is a versatile instrument for a wide array of applications in the areas of process development, failure analysis, reliability, and quality control.
ABSOLUTE 3D CARTOGRAPHY FUNCTION OF THE TEMPERATURE |
TDM is a patented tool for warpage analysis under a temperature profile. TDM uses the fringe projection
technology (also called projection moiré) for non-contact, full-field acquisition of 3D topographies with
a resolution as low as 1 μm. TDM-TT acquires a full, absolute 3D cartography of devices with dimensions
up to 75 mm x 75 mm. Simultaneously, its powerful heating and cooling capabilities allow for virtually
any temperature profile on the sample under test. The integrated software package provides tools for
representation of the results as 3D plots, vectors diagrams, isometrics views and 2D profiles following
user-defined profile lines (e.g., diagonal plots).