Imaging : | Direct sample illumination, non-contact measurement |
Capabilities : | Topography analysis: z(x,y) function of the temperature |
Maximum samples size : | 310 mm x 230 mm |
Oven size : | 150 mm x 150 mm |
Field of view (x,y) : | Continuous Zoom from 30 x 30 to 150 x 150 mm |
Depth of view (z) : | Up to 25 mm |
CCD camera resolution : | 5 megapixel |
Accuracy : | +/-1 micron or 2% of measured value, whichever is greater |
(x,y) resolution : | 15 μm to 75 μm depending on the FOV |
Temperature range : | Room temperature to 300° C continuous |
Heating method : | IR lamps - top and bottom |
Heating rate : | Up to +3° C/s (sample dependent) |
Cooling method : | Regulated flow of pulsed air |
Cooling rate : | Up to -2° C/s above 120° C |
Footprint : | 140 cm x 120 cm x 245 cm |
Weight approx : | 330 kg |
Utilities : | Electricity : 230 VAC, 50 Hz, single phase . Compressed air : 6 bar. |