NORDSON MARCH AP-1000Plasma System
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    Nordson AP-1000 Plasma System Features:


    PLC controller with touch screen provides an intuitive graphical interface and 

    real time process representation

    Flexible shelf architecture allows processing of a wide variety of part carriers in either direct or 

    downstream plasma mode

    13.56 MHz RF generator has automatic impedance matching for unparalleled process reproducibility

    Proprietary software control system generates process and production data for statistical process control


    Nordson AP-1000 Plasma System Benefits:


    Uniform plasma treatment for the most demanding production environments

    The Nordson MARCH AP-1000 system is designed to meet the rigorous demands of 24-hour operation in high performance manufacturing environments. The system delivers uniform plasma treatment with unmatched reliability, safety and ease of operation.

    The AP-1000 system is completely self-contained, requiring minimal floor space. The pump, chamber, control electronics, and 13.56 MHz RF generator are housed in a single enclosure. Full front access allows for convenient access to all interior components. The pump is positioned on rollers for easy removal.

    The plasma chamber is constructed of 11-gauge stainless steel with aluminum fixtures for superior durability. The chamber has multiple removable and adjustable shelves to accommodate a range of part carriers, including magazines, trays, wafer and Auer® boats.


    Enhanced productivity for high-volume capacity requirements 

    The AP-1000 system with optional HTP (high throughput) shelves combines the reliability and process quality of the AP-1000 system with the proven benefits of Nordson MARCH’s unique shelf design. The AP- 1000 HTP system optimizes use of the reactive ions found in RF plasma, increasing treatment uniformity while decreasing process time. 

    The AP-1000 HTP system allows selection from a range of process gases such as Argon, Hydrogen and Helium. It comes standard equipped with four mass flow controllers for optimal gas control. Slotted magazines are placed vertically inside the chamber. 

    Additionally, slotted magazines can be placed vertically inside the chamber. Typically, each magazine holds a minimum of 20 lead frames. The AP-1000 plasma chamber can hold up to 12 magazines, depending on magazine size.


    Nordson AP-1000 Plasma System Specifications:


    Enclosure

    Dimensions

    W x D x H – Footprint

    680W x 1127D x 1890H

    (26.77W x 62.3D x 74.4H in.)

    Net Weight

    485 kg (1069 lbs)

    Equipment Clearance

    Right, Left – 153 mm (6 in.), Front-680 mm 

    (27 in.) Back-483 mm (19 in.) min.

    Chamber

    Maximum Volume

    127 liters (7774 in³)

    Variable Electrode

    Configurations

    Power-Ground, Ground-Power, Power-Power

    Number of Electrode Positions

    14

    Electrode Pitch

    25.4 mm (1 in.) for 600 W

    50.8 mm (2 in.) for 1000 W

    Electrodes

    Powered Working Area

    349W x 425D mm (13.74W x 16.73D in.)

    Ground/Perforated 

    Working Area

    384W x 425D mm (15.12W x 16.73D in.)

    Floating Working Area

    349W x 425D mm (13.74W x 16.73D in.)

    RF Power

    Standard Wattage

    600 W

    Optional Wattage

    1000 W

    Frequency

    13.56 MHz

    Gas Control

    Available Flow Volumes

    10, 25, 50, 100, 250, 500, 1000, 2000 or 

    5000 sccm

    Maximum Number of MFCs

    4

    Control &Interface

    Software Control

    PLC Control with Touch Screen Interface

    Remote Interface

    PlasmaLINK, ProcessLINK, SECS/GEM

    Vacuum Pump

    Standard Wet Pump

    53 cfm with Oxygen Oil Mist Eliminator

    Optional Wet Pump

    53 cfm with Corrosive Oil Mist Eliminator

    Optional Purged Dry Pump

    63 cfm

    N2 Purged Pump Flow

    14 slm

    Cooling Water 

    Purged Pump Flow

    5 slm

    Facilities

    Power Supply

    220 V, 25 A, 50/60 Hz, 3-Phase, 

    8 AWG, 4-Wire;380 V, 25 A, 50/60 Hz, 3-Phase,

    8 AWG, 5-Wire

    Process Gas 

    Fitting Size & Type

    6.35 mm (0.25 in.) OD Swagelok Tube

    Process Gas Purity

    Lab or Electronic Grade

    Process Gas Pressure

    0.69 bar (10 psig) min. to 1.03 bar 

    (15 psig) max., regulated

    Purge Gas Fitting Size & Type

    6.35 mm (0.25 in.) OD Swagelok Tube

    Purge Gas Purity

    Lab or Electronic Grade N2/CDA

    Purge Gas Pressure

    2 bar (30 psig) min. to 6.9 bar 

    (100 psig) max., regulated

    Pneumatic Valves 

    Fitting Size & Type

    6.35 mm (0.25 in.) OD Swagelok Tube

    Pneumatic Gas Purity

    CDA, Oil Free, Dewpoint ≤7°C(45°F),

    Particulate Size<5 µm

    Pneumatic Gas Pressure

    3.45 bar (50 psig) min. to 6.89 bar 

    (100 psig) max.,regulated

    Exhaust

    38 mm (1.5 in.) OD Pipe Flange

    Compliance

    SEMI

    S2/S8 (EH&S/Ergonomics)

    International

    CE Marked

    Ancillary

    Equipment

    Gas Generators

    Nitrogen, Hydrogen

    (Requires Additional Non-Optional Hardware)

    Facilities

    Chiller, Scrubber




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