4”-8”Wafer Application |
Fully automatic vacuum mounting |
Thinner wafer contact or non-contact mounting |
Configure with flip arm wafer transfer robot |
Bernoulli arm for wafer handling |
Wafer position & warpage intelligent mapping |
Load wafer from cassette or box |
Non-contact beam sensor for wafer alignment |
PC based control with Windows OS |
Non-UV & UV tape compatible |
SECS/GEM or simple communication |